Boost your research potential & productivity

– Ultra-pure epitaxy with almost all elements
– Superior flexibility, throughput, and reliability

Epiray introduces Thermal Laser Epitaxy (TLE) – a novel technology for the deposition of high-purity thin films. Epiray is a spin-off of the Max Planck Society pioneering a new era of epitaxy research.

A new deposition technology that will significantly impact thin film research and production.

TLE adds significant flexibility and speed to thin-film research. Targets can be changed on a daily basis, and almost any material can be used. Layers of ultra-high purity can be deposited. Multiple cheap chambers can be used in parallel with one set of lasers, thus widely different materials can be used in parallel. Operating cost are low. It allows to conduct many more experiments in a given timeframe, with more diverse elements, than any other epitaxy method on the market. Boost your research with TLE!

Learn more about our technology or check out our TLE system or laser substrate heater for thin-film deposition system upgrades.

Artistic view of the TLE deposition process. Both the substrate and the elemental metal sources are heated by laser beams.